NEOVAC Synthetic Hydrocarbon Fluid


NEOVAC® SO-M, SO-H, and SA-H are a line of synthetic hydrocarbon vacuum oils suitable for a variety of applications, including crystal growth, etching, CVD, and ion implantation. NEOVAC synthetic hydrocarbon fluids offer low vapor pressure, heat and acid resistance, reactive gas resistance, and radiation resistance.

Inland Vacuum is the exclusive authorized distributor of the NEOVAC vacuum fluids line.

NEOVAC® is a registered trademark of Moresco.

  • Low vapor pressure
  • Heat and acid resistant
  • Resistant to reactive gases: Halide, NOX, Ozone
  • Radiation resistant
  • Environmentally safe

  • Oxidation
  • Crystal growth
  • Ashing
  • Etching
  • CVD
  • Ion implantation

Vapor Pressure at 50ºC (torr)<3x10-6<3x10-7<3x10-7
Viscosity at 40ºC (cSt)63.7 95.0 95.0
Pour Point (ºC)-20-15-15
Flash Point (ºC)254300300
Thermal Stability (170ºC x 24h)passedpassedpassed

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