Vacuum Pump Preventative Maintenance Products

Vacuum Pump Preventative Maintenance Products

Inland Vacuum’s vacuum pump preventative maintenance products help keep your vacuum pump running smoothly and efficiently. Preventative maintenance of mechanical vacuum pumps by utilizing regular, scheduled oil changes pays off in several ways:

  • expensive down time is reduced
  • process running time is optimized
  • cost of expensive repairs is greatly reduced
  • system performance is continuous and predictable

During the operation of the vacuum pump, the oil becomes the sump for any solids and condensables carried over from the process. As the carry-over builds up in the pump, oil performance deteriorates, affecting over pump capacity. Operating vacuum levels and concurrent mechanical wear is most directly affected by this.

Inland Vacuum has expanded its line of vacuum pump preventive maintenance products to include a number of new flushing fluids. This section also includes information on Galden PFS-2 Solvent and our Acidity Test Kits.

Inland FF-10 and Inland FF-TW

Inland FF-10 and Inland FF-TW are solvent free hydrocarbon flushing fluids designed to be used as part of a preventive maintenance program. Periodic use of FF-10 will enable the user to remove contaminants and particulates from within all areas of the pump without the worry of contaminating the pump with an expensive solvent. FF-TW is designed for pumps that have been filled with TW and HVTW-type vacuum pump fluids.

SpecificationsFF-10FF-TW
Vapor Pressure at 25ºC (torr)2x10-4<10-4
Viscosity at 40ºC (cSt)2829
Viscosity at 100ºC (cSt)4.55
Flash Point (ºC)199213
Fire Point (ºC)221210
Density at 25ºC (g/ml)0.850.85

Inland FF-45

Inland FF-45 solvent-free flushing fluid is specifically designed for use with pumps operated with synthetic hydrocarbon fluids. Periodic use of FF-45 to remove pump contaminants and particulates will prolong pump life to avoid costly rebuilding.

SpecificationsInland FF-45 
Vapor Pressure at 25ºC (torr)1x10-5
Viscosity at 40ºC (cSt)26
Viscosity at 100ºC (cSt)4
Flash Point (ºC)240
Fire Point (ºC)252
Density at 25ºC (g/ml)0.83

Galden Perfluorosolv PFS-2 Solvent

Galden® Perfluorosolv PFS-2 Solvent is a low molecular weight perfluoropolyether which can be used in many industrial applications. PFS-2 performs well in many electronic and semiconductor cleaning applications such as:

  • Pump and compressor cleaning-
  • Vapor blanketing
  • Degreasing
  • Flash point reduction
  • Dewatering
  • Trace residue elimination


PFS-2 solvent has been formulated to be compatible and completely miscible with perfluoropolyether (PFPE) and perfluorocarbon fluids at all temperatures and chlorotrifluoroethylene (CTFE) oils and greases above 45°C. All of these materials are used extensively in semiconductor and electronic manufacturing. PFS-2 solvent can also act as a diluent in the application of more viscous PFPE fluids or greases.

PFS-2 solvent is non-flammable and well suited for cleaning operations where:

  • solvents are applied to hot components
  • solvents are heated prior to application
  • solvents are pressure sprayed on components
  • solvents are used in forced air stream cleaning
  • extended immersion baths are required


PFS-2 has a lower boiling point and hence a higher evaporation rate compared to PFS-1. Parts cleaned with PFS-2 will dry faster that those cleaned with PFS-1. When using PFS-2, especially in open baths, it may be necessary to take precautions to avoid excessive losses from the bath.

Typical PropertiesPFS-2PFS-1
ODP (ozone depletion potential)zerozero
Boiling Point (ºC)5790
Density at 25ºC (g/ml)1.651.69
Viscosity at 25ºC( cSt)0.450.75
Vapor Pressure at (25ºC, torr)228100
Flash Point (ºC)nonenone
Surface Tension at 25ºC (dyne/cm)1014
Heat of Vaporization at boiling point (cal/g)2217

Acidity Test Kit

Inland Vacuum’s Acidity Test Kit is an easy-to-use kit designed to detect acidic buildup in hydrocarbon or non-hydrocarbon inert vacuum pump fluids. Acid buildup – common in today’s corrosive semiconductor environments – can attack a vacuum pump’s internal components, leading to pump failure and unnecessary downtime.

Use of the Acidity Test Kit helps determine fluid or filter element change rates for optimum system performance. Each kit can perform 7 individual tests.

  • Detects acidity buildup in hydrocarbon and non-hydrocarbon fluids
  • Indicates fluid or filter element change rates

Galden® is a registered trademark of Solvay.

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