NEOVAC General Purpose Fluid


NEOVAC® MR-100 and MR-200 are hydrocarbon vacuum oils suitable for a variety of applications, including vapor deposition, sputtering, and laser etching. NEOVAC general purpose fluid is a line of vacuum oils that offers good lubrication properties, high stability, reduced backstreaming, and emulsion resistance.

Inland Vacuum is the exclusive authorized distributor of the NEOVAC vacuum fluids line.

NEOVAC® is a registered trademark of Moresco.

  • Low vapor pressure
  • Reduced backstreaming
  • Emulsion resistant
  • Good lubrication
  • High stability

  • Vapor deposition
  • Sputtering
  • Etching
  • Oxidation
  • Electron beam
  • Crystal growth

Vapor Pressure at 50ºC (torr)<1x10-4<1x10-5
Viscosity at 40ºC (cSt)44.6 71.0
Pour Point (ºC)-17.5-17.5
Flash Point (ºC)230256
Thermal Stability (170ºC x 24h)passedpassed

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