NEOVAC General Purpose Fluid

NEOVAC® MR Series

NEOVAC® MR-100 and MR-200 are hydrocarbon vacuum oils suitable for a variety of applications, including vapor deposition, sputtering, and laser etching. NEOVAC general purpose fluid is a line of vacuum oils that offers good lubrication properties, high stability, reduced backstreaming, and emulsion resistance.

Inland Vacuum is the exclusive authorized distributor of the NEOVAC vacuum fluids line.

NEOVAC® is a registered trademark of Moresco.

Low vapor pressure
Reduced backstreaming
Emulsion resistant
Good lubrication
High stability

Vapor deposition
Sputtering
Etching
Oxidation
Electron beam
Crystal growth

Specifications	MR-100	MR-200
Vapor Pressure at 50ºC (torr)	<1x10-4	<1x10-5
Viscosity at 40ºC (cSt)	44.6	71.0
Pour Point (ºC)	-17.5	-17.5
Flash Point (ºC)	230	256
Thermal Stability (170ºC x 24h)	passed	passed
Color	L0.5	L0.5