NEOVAC Synthetic Diffusion Pump Fluid

NEOVAC SX and SY Series

NEOVAC® SX and SY are synthetic vacuum oils produced through a fractional distillation process using refined alkyldiphenylether. NEOVAC SX and SY diffusion pump fluids are suitable for applications such as vapor deposition, sputtering, and surface treatment. The fluids offer low vapor pressure as well as excellent thermal stability and oxidation resistance.

Inland Vacuum is the exclusive authorized distributor of the NEOVAC vacuum fluids line.

NEOVAC® is a registered trademark of Moresco.

Low vapor pressure
Reduced backstreaming
High pumping speed
Thermostability
High chemical resistance
Environmentally safe

Vapor deposition
Sputtering
Surface treatment

Specifications	SX	SY
Vapor Pressure at 25ºC (torr)	5x10-8	1x10-8
Viscosity at 40ºC (cSt)	22	25
Specific Heat (cal/g)	0.55	0.55
Flash Point (ºC)	250	260
Working Temperature (ºC)	170~210	180~253
Color	L0.5	L0.5