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geminYe Inert PFPE Mechanical Pump Oil
geminYe Inert PFPE Mechanical Pump Oil
geminYe® perfluoropolyether (PFPE) family of lubricants are non-flammable, chemically inert, and thermally stable. geminYe PFPE mechanical fluid oils have excellent lubricity properties and are available in viscosity grades suitable for use in all vacuum pumps. When used with proper filtration, geminYe fluids provide exceptionally long service life. A drop-in replacement and direct equivalent to other PFPE brand vacuum oils, geminYe fluids are completely miscible with Fomblin®, Krytox®, and other brand inert PFPE fluids of the same grade.
geminYe® LV Inert Vacuum Pump Fluids
geminYe LV is an inert perfluorinated fluid mixture with a hexafluoropropylene base. Because the chemical chain contains only carbon, fluorine, and oxygen, it exhibits excellent physical properties, including excellent lubricity and minimal backstreaming.
geminYe® RP Inert Vacuum Pump Fluids
geminYe RP incorporates an antirust additive which enables the fluid to withstand even the harshest chemical environments. The additive allows for greatly reduced or eliminated corrosion, thus providing a cleaner vacuum operation and decreased maintenance costs.
geminYe® SV Inert Vacuum Pump Fluids
geminYe SV is an advanced inert perfluorinated fluid with a backstreaming rate of virtually zero, allowing for an ultra clean vacuum. This fluid offers excellent performance in dry etcher and CVD applications without the need to invest in dry pump technology.
- Low vapor pressure
- Oxygen compatible
- Non-flammable
- Solvent resistant
- Low relative weight loss
- Chemically inert
- Excellent compatibility with metals, plastics, elastomers
- CFC-free & Ozone friendly
- Corrosion resistant
- High thermal stability
- High dielectric properties
- No flash or fire point
- Reclaimable
- Made in the USA
- Semiconductors
- Chemical pumping (lewis acids)
- Oxygen pumping (geminYe LV and RP)
- LPCVD
- Reactive ion etching
- Plasma etching
geminYe LV Grades
| Typical Property | geminYe 06 | geminYe 14 | geminYe 16 | geminYe 25 |
|---|---|---|---|---|
| Specific gravity at 20ºC (g/cm3) | 1.88 | 1.89 | 1.89 | 1.90 |
| Kinematic viscosity at 20ºC (cSt) | 62 | 142 | 168 | 261 |
| Pour point (ºC) | -60 | -54 | -45 | -48 |
| Vapor pressure at 20ºC (torr) | 4x10-7 | 2x10-7 | 2x10-7 | 1x10-7 |
| Flash Point (ºC) | none | none | none | none |
| Fire Point (ºC) | none | none | none | none |
geminYe RP Grades
| Typical Property | geminYe 06 RP | geminYe 14 RP | geminYe 16 RP | geminYe 25 RP |
|---|---|---|---|---|
| Boiling Point (ºC) | >270 | >270 | >270 | >270 |
| Viscosity at 20ºC (cSt) | 73 | 165 | 165 | 290 |
| Vapor pressure at 20ºC (torr) | 5x10-6 | 4x10-7 | 4x10-7 | 4x10-7 |
| Flash Point (ºC) | None | None | None | None |
| Density (g/ml) | 1.88 | 1.89 | 1.89 | 1.90 |
geminYe SV Grades
| Typical Property | SV | SVRP | ||
|---|---|---|---|---|
| Specific gravity at 20ºC (g/cm3) | 1.90 | 1.90 | ||
| Kinematic viscosity at 20ºC (cSt) | 200 | 200 | ||
| Pour point (ºC) | -38 | -38 | ||
| Vapor pressure at 20ºC (torr) | 5x10-9 | 5x10-9 | ||
| Flash Point (ºC) | none | none | ||
| Fire Point (ºC) | none | none |
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