Invoil General Purpose Hydrocarbon Diffusion Pump Fluid

Invoil® Series General Purpose Hydrocarbon Fluids

Invoil 20

Invoil® 20 is a double distilled, high quality, general purpose hydrocarbon diffusion pump fluid that works well in any diffusion pump. It has been distilled to remove the majority of the light fractions present in all raw material feedstock. Invoil 20 is designed the meet the vapor pressure requirements of a diffusion pump while exhibiting excellent thermal stability and resistance to corrosive attack. It can also be used as a mechanical pump fluid, allowing the user to establish a homogenous system, thus helping prevent any possible cross contamination.

Invoil 30

Invoil® 30 is a specially developed double-distilled diffusion pump fluid. This hydrocarbon is modified for high temperature use with a strong antioxidant. Invoil 30 can be used in applications such as metallizing, optical and microelectric coating, sputtering, and metallurgy. Its properties include increased resistance to decomposition and improved stability against oxidation.

Invoil 40

Invoil® 40 is a diffusion pump fluid specially designed to handle the high temperatures and gas loads inherent in metallurgical applications. This fluid is double distilled from straight petroleum oils and is modified for high temperature use with a strong antioxidant.

Invoil 44

Invoil® 44 is specially developed for use in vapor booster diffusion pumps. This solvent refined petroleum-based oil provides fast pump down and exhibits excellent oxidation resistance.


    Invoil 20

  • Corrosion resistant
  • Low vapor pressure
  • Reduced backstreaming
  • Suitable for mechanical, diffusion, and turbomolecular pumps


    Invoil 30

  • Decomposition resistant
  • High viscosity
  • Improved stability against oxidation


    Invoil 40

  • Designed to handle high temperatures and gas loads
  • Thermally stable


    Invoil 44

  • Rapid pumpdown
  • Oxidation resistance
  • Excellent vapor pressure
  • Designed for use in vapor booster diffusion pumps



    Invoil 20

  • Thin film sputtering
  • Vacuum furnaces
  • Metallization
  • Mass spectrometry


    Invoil 30

  • Metallization
  • Optical coating
  • Microelectric coating
  • Sputtering
  • Metallurgy


    Invoil 40

  • Metallurgy
  • Vacuum furnaces


    Invoil 44

  • Vapor booster
  • Metallization



SpecificationsInvoil 20Invoil 30Invoil 40Invoil 44
Vapor Pressure at 25ºC (torr)3x10-65x10-61x10-53x10-6
Boiling Point at .01 torr  (ºC)127127126126
Viscosity at 40ºC (cSt)58585835
Viscosity at 100ºC (cSt)8.58.58.55.6
Pour Point (ºC)-10-10-9-10
Flash Point (ºC)224241243201
Fire Point (ºC)259271261244
Density at 25ºC (g/ml)0.860.860.860.86

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